RFプローブキット
ナノ材料分析・評価装置群
| 装置番号／ARIM設備ID | C27／KT-327 |
|---|---|
| 装置名 | RFプローブキット RF Microwave Probe Kit |
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| 製造社名 | Cascade Microtech (https://www.formfactor.com/japan/) |
| 品名・型番 | ZPROBE |
| 特徴 | |
| キーワード | |
| 設置場所 | 総合研究10号館 加工・評価室 |
| 装置利用料金 | こちらをご覧ください |
仕様
|
Electrical Characteristics |
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| Characteristic impedance | 50 Ω |
| Frequency range | DC to 40 GHz |
| Return loss | > 18 dB DC to 40 GHz** |
| Insertion loss | < 0.8 dB DC to 40 GHz** |
| Maximum RF power | 5 W at 40 GHz |
| Maximum DC current | 1.5 A |
| Maximum DC voltage | 100 V |
| Contact resistance on Au | < 4 mΩ** |
| Mechanical Characteristics | |
| Contacts | Solid nickel springs |
| Insulator | RF dielectric |
| Contact cycles on Al | > 1,000,000 |
| Contact spring pressure | 6 N/mm |
| Available standard pitches*** | 50 μm to 200 μm with 25 μm increments, 200 μm to 1250 μm with 50 μm increments |
| RF Connector | |
| Type | PC 2.92 mm, female |
| Coupling torque | 0.8 Nm to 1.1 Nm (Recommended) |
| Outer contact | Stainless steel |
| Center contact | CuBe with Au plating |
| Insulator | PEEK |
| Environmental Data | |
| Temperature range | -100 °C to 200 °C (Type K, standard), 10 K to 300 °C (Type Y, extreme temperature) |
*Data, design and specification depend on individual process conditions and can vary according to equipment configurations. Not all specifications may be valid simultaneously.
**Typical for probes with pitches from 50 μm to 200 μm ***1MX technology is available for pitches up to 500 μm.